| Model | AI-LM-420RA | ||
| Stage | Rotary Stage | ||
| Travel | +/- 5 deg | ||
| Diameter | 420 mm | ||
| Dimensions (Length x Width x Height) | 490 mm x 420 mm x 40 mm | ||
| Thru | 330 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 1.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.4 arc-sec | +/- 0.3 arc-sec | +/- 0.2 arc-sec |
| Resolution [2] | Standard: 0.005 arc-sec (Analog) Optional: 0.002 - 5.0 arc-sec (Digital) |
||
| Axial Runout | +/- 1.5 µm | N/A | |
| Radial Runout | +/- 1.5 µm | N/A | |
| Wobble | +/- 2.5 arc-sec | N/A | |
| Max Velocity [3] | 900 deg/s | ||
| Max Acceleration [3] | 800000 deg/s² | ||
| Max Load (Axial) | 40 kg | ||
| Max Load (Radial) | 20 kg | ||
| Assembly Mass | 8.7 kg | ||
| Model | AI-LM-200RA | ||
| Stage | Rotary Stage | ||
| Travel | +/- 7.5 deg | ||
| Diameter | 200 mm | ||
| Dimensions (Length x Width x Height) | 270 mm x 200 mm x 36 mm | ||
| Thru | 100 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 1.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | +/- 0.4 arc-sec | +/- 0.2 arc-sec |
| Resolution [2] | Standard: 0.01 arc-sec (Analog) Optional: 0.003 - 10.0 arc-sec (Digital) |
||
| Axial Runout | +/- 2.0 µm | N/A | |
| Radial Runout | +/- 2.0 µm | N/A | |
| Wobble | +/- 4.0 arc-sec | N/A | |
| Max Velocity [3] | 1500 deg/s | ||
| Max Acceleration [3] | 2000000 deg/s² | ||
| Max Load (Axial) | 40 kg | ||
| Max Load (Radial) | 20 kg | ||
| Assembly Mass | 4 kg | ||
| Model | AI-TM-154RA | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 154 mm | ||
| Dimensions (Length x Width x Height) | 173 mm x 154 mm x 84 mm | ||
| Aperture / Thru | 72 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Sensors | Integrated Home | ||
| Bearings | Angular Contact (Duplex Pair) | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.5 arc-sec | ||
| Axial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Radial Runout | +/- 5.0 µm | +/- 3.5 µm | +/- 2.0 µm |
| Wobble | +/- 10.0 arc-sec | +/- 5.0 arc-sec | +/- 3.0 arc-sec |
| Resolution [2] | Standard: 0.013 arc-sec (Analog) Optional: 0.004 - 14.0 arc-sec (Digital) |
||
| Max Velocity [3] | 5500 deg/s | ||
| Max Acceleration [3] | 160000 deg/s² | ||
| Max Load (Axial) | 20 kg | ||
| Max Load (Radial) | 20 kg | ||
| Assembly Mass | 4.4 kg | ||
| Model | AI-TM-125R-AB |
| Stage | Rotary Stage |
| Travel | 360 deg continuous |
| Diameter | 125 mm |
| Dimensions (Length x Width x Height) | 145 mm x 145 mm x 150 mm |
| Aperture / Thru | 19 mm |
| Drive | Torque Motor |
| Feedback | Non-Contact Optical Rotary Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Axial Runout (Standard) | 0.5 µm |
| Radial Runout (Standard) | 0.5 µm |
| Axial Stiffness [7] | 263 N/µm |
| Radial Stiffness [7] | 87 N/µm |
| Tilt Stiffness [7] | 0.18 Nm/µrad |
| Resolution (Standard) [8] | Standard: 0.02 arc-sec (Analog) Optional: 0.021 - 21.0 arc-sec (Digital) |
| Max Velocity [6] | 1800 deg/s |
| Max Axial Load [7] | 37 kg |
| Max Radial Load [7] | 14 kg |
| Assembly Mass | 9.6 kg |
| Model | AI-TM-104R | ||
| Stage | Rotary Stage | ||
| Travel | 360 deg continuous | ||
| Diameter | 104 mm | ||
| Dimensions (Length x Width x Height) | 123 mm x 104 mm x 80 mm | ||
| Aperture / Thru | 32 mm | ||
| Drive | Torque Motor | ||
| Feedback | Non-Contact Optical Rotary Encoder | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Angular Accuracy | N/A | +/- 3.0 arc-sec | |
| Bidirectional Angular Repeatability | +/- 0.6 arc-sec | +/- 0.5 arc-sec | +/- 0.3 arc-sec |
| Resolution [2] | Standard: 0.02 arc-sec (Analog) Optional: 0.005 - 21.0 arc-sec (Digital) |
||
| Axial Runout | +/- 6.0 µm | +/- 4.5 µm | +/- 3.0 µm |
| Radial Runout | +/- 6.0 µm | +/- 4.5 µm | +/- 3.0 µm |
| Wobble | +/- 12.5 arc-sec | +/- 7.5 arc-sec | +/- 5.0 arc-sec |
| Max Velocity [3] | >8000 deg/s | ||
| Max Acceleration [3] | 400000 deg/s² | ||
| Max Load (Axial) | 12 kg | ||
| Max Load (Radial) | 12 kg | ||
| Assembly Mass | 2.7 kg | ||
| Model | AI-LM-100000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 1000 mm (+/- 500 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 2050 mm x 1600 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-80000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 800 mm (+/- 400 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1850 mm x 1400 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-60000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 600 mm (+/- 300 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1650 mm x 1200 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-50000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 500 mm (+/- 250 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1550 mm x 1100 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-40000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 400 mm (+/- 200 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1450 mm x 1000 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-30000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 300 mm (+/- 150 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1350 mm x 800 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-LM-20000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 200 mm (+/- 100 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1250 mm x 700 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options | |
| Model | AI-HH-200XY-60Z-154RA | |||
| Stage | Hybrid Hexapod | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 60 mm (+ 60 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 14 deg | |||
| Travel - Yaw | 360 deg continous | |||
| Dimensions (Length x Width x Height) | 443.2 mm x 410.1 mm x 378 mm | |||
| Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
|||
| Brake | Pneumatic Release, Spring Lock | |||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
| Z | +/- 100 nm | +/- 70 nm | ||
| Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 10 nm | 7 nm | 4 nm |
| Radial Runout | 10 nm | 7 nm | 4 nm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.02 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | XY | 500 mm/s | ||
| Z | 30 mm/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 60 deg/s | ||
| Yaw | 1800 deg/s | |||
| Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
| Yaw | >3600 deg/s² | |||
| Max Payload | 20 kg | |||
| Assembly Mass | 57 kg | |||
| Model | AI-HH-300XY-206Z-154R | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 300 mm (+/- 150 mm) | |||
| Travel - Z | 206 mm (+ 206 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 18 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 504.2 mm x 500 mm x 660 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.08 arc-sec | |||
| Yaw | < 0.08 arc-sec | |||
| Yaw Runout | Axial Runout | 10 µm | 7 µm | 4 µm |
| Radial Runout | 10 µm | 7 µm | 4 µm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.01 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.5 m/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | 180 deg/s | |||
| Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
| YAW | >3600 deg/s² | |||
| Max Payload | 20 kg | |||
| Assembly Mass | 122 kg | |||
| Model | AI-LM-10000-Z-ABCB | ||
| Stage | Vertical Z Stage | ||
| Travel | 100mm (+/- 50mm) | ||
| Dimensions (Length x Width x Height) | 183.5mm x 50mm x 323mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Air Bearing Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
| Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Max Velocity [3] | 0.25 m/s | ||
| Max Peak Acceleration [3] | 3.5 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 4.7 kg | ||
| Model | AI-VC-2400-NANO-Z-CB |
| Travel | 24 mm (+ 24 mm/- 0 mm) |
| Dimensions (Diameter x Height) | 200 mm x 112 mm |
| Stage | Vertical Z Stage |
| Motor | Dual Voice Coil Motor (VC) |
| Feedback | Dual Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Counterbalance | Pneumatic Cylinder |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | Depending on specific application - Ask ALIO |
| Max Velocity | 0.2 m/s |
| Max Acceleration | 0.5 G |
| Assembly Mass | 6.5 kg |
| Max Payload | 20 kg |
| Model | AI-LM-6000-50N-Z-CB | ||
| Stage | Vertical Z Stage | ||
| Travel | 60 mm (+ 60 mm/- 0 mm) | ||
| Dimensions (Length x Width x Height) | 175 mm x 125 mm x 235 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 75 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch | +/- 12 arc-sec | ||
| Yaw | +/- 12 arc-sec | ||
| Roll | +/- 12 arc-sec | ||
| Max Velocity [3] | 0.25 m/s | ||
| Max Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 20 kg | ||
| Force | 50 N | ||
| Assembly Mass | 12.3 kg | ||
| Model | AI-VC-2400-120N-Z-CB | ||
| Stage | Vertical Z Stage | ||
| Travel | 24 mm (+ 24 mm/- 0 mm) | ||
| Dimensions (Length x Width x Height) | 175 mm x 125 mm x 170 mm | ||
| Motor | Voice Coil Motor (VC) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 0.8 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 75 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2 µm | +/- 0.8 µm | +/- 0.4 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch | +/- 10 arc-sec | ||
| Yaw | +/- 10 arc-sec | ||
| Roll | +/- 10 arc-sec | ||
| Max Velocity [3] | 0.25 m/s | ||
| Max Acceleration [3] | 1.0 G | ||
| Max Payload Capability | 16 kg | ||
| Force | 120 N | ||
| Assembly Mass | 8.0 kg | ||
| Model | AI-VBS-20000 | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 492 mm x 154 mm x 50 mm | ||
| Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
| (-Pbrk) Dimensions (Length x Width x Height) | 524 mm x 154 mm x 50 mm | ||
| (-Ebrk) Dimensions (Length x Width x Height) | 571 mm x 154 mm x 50 mm | ||
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4 µm | +/- 1.0 µm | +/- 0.4 µm |
| Backlash | 0 nm | ||
| Bidirectional Linear Repeatability | +/- 100 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5 µm | +/- 4 µm | +/- 3 µm |
| Flatness [2] | +/- 5.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15 arc-sec | ||
| Yaw | +/- 15 arc-sec | ||
| Roll | +/- 15 arc-sec | ||
| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
| Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
| Assembly Mass | 8 kg | ||
| Model | AI-VBS-15000 | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 370 mm x 120 mm x 50 mm | ||
| Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
| (-Pbrk) Dimensions (Length x Width x Height) | 404 mm x 120 mm x 50 mm | ||
| (-Ebrk) Dimensions (Length x Width x Height) | 452 mm x 120 mm x 50 mm | ||
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 1.0 µm | +/- 0.4 µm |
| Backlash | 0 nm | ||
| Bidirectional Linear Repeatability | +/- 100 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.5 µm | +/- 2.5 µm | +/- 1.5 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15 arc-sec | ||
| Yaw | +/- 15 arc-sec | ||
| Roll | +/- 15 arc-sec | ||
| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
| Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
| Assembly Mass | 4.6 kg | ||
| Model | AI-VBS-10000 | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 295 mm x 120 mm x 50 mm | ||
| Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
| (-Pbrk) Dimensions (Length x Width x Height) | 329 mm x 120 mm x 50 mm | ||
| (-Ebrk) Dimensions (Length x Width x Height) | 377 mm x 120 mm x 50 mm | ||
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 1.0 µm | +/- 0.3 µm |
| Backlash | 0 nm | ||
| Bidirectional Linear Repeatability | +/- 100 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15 arc-sec | ||
| Yaw | +/- 15 arc-sec | ||
| Roll | +/- 15 arc-sec | ||
| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
| Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
| Assembly Mass | 3.8 kg | ||
| Model | AI-VBS-6000 | ||
| Stage | Linear Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 225 mm x 120 mm x 50 mm | ||
| Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
| (-Pbrk) Dimensions (Length x Width x Height | 259 mm x 120 mm x 50 mm | ||
| (-Ebrk) Dimensions (Length x Width x Height) | 307 mm x 120 mm x 50 mm | ||
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 0.7 µm | +/- 0.3 µm |
| Backlash | 0 nm | ||
| Bidirectional Linear Repeatability | +/- 100 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15 arc-sec | ||
| Yaw | +/- 15 arc-sec | ||
| Roll | +/- 15 arc-sec | ||
| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability W/ Axis Oriented Horizontal | 20 kg | ||
| Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
| Assembly Mass | 3 kg | ||
| Model | AI-CM-20000-200-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 332.5 mm x 332.5 mm x 65 mm | ||
| Aperture / Thru | 200 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 11.4 kg | ||
| Model | AI-CM-15000-150-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 282.5 mm x 282.5 mm x 52 mm | ||
| Aperture / Thru | 150 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.9 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.2 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 7.4 kg | ||
| Model | AI-CM-10000-100-XY | ||
| Stage | Monolithic XY Stage with Open Center |
||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 229.5 mm x 229.5 mm x 52 mm | ||
| Aperture / Thru | 100 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.6 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.6 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 5.6 kg | ||
| Model | AI-CM-20000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 275 mm x 275 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 12 kg | ||
| Model | AI-CM-15000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 225 mm x 225 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.8 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 8.5 kg | ||
| Model | AI-CM-10000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 184 mm x 184 mm x 60 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 30 | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.3 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 0.7 m/s | ||
| Bot Axis Max Velocity [3] | 0.5 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.2 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.6 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 5.8 kg | ||
| Model | AI-CM-20000 | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 279 mm x 120 mm x 32 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 5.0 µm | +/- 4.0 µm | +/- 3.0 µm |
| Flatness [2] | +/- 5.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Max Velocity [3] | 1.4 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 3.2 kg | ||
| Model | AI-CM-15000 | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 229 mm x 120 mm x 32 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 3.5 µm | +/- 2.5 µm | +/- 1.5 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Max Velocity [3] | 1.1 m/s | ||
| Max Acceleration [3] | 1.8 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 2.5 kg | ||
| Model | AI-CM-10000 | ||
| Stage | Linear Stage | ||
| Travel | 100 mm (+/- 50 mm) | ||
| Dimensions (Length x Width x Height) | 190 mm x 120 mm x 32 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.3 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 12.0 arc-sec | ||
| Yaw | +/- 12.0 arc-sec | ||
| Roll | +/- 12.0 arc-sec | ||
| Max Velocity [3] | 1 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 12 kg | ||
| Assembly Mass | 2.2 kg | ||
| Model | AI-LM-6000 | ||
| Stage | Linear Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 168 mm x 120 mm x 40 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch Y [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Max Velocity [3] | 1.2 m/s | ||
| Max Acceleration [3] | 5.0 G | ||
| Max Payload Capability | 20 kg | ||
| Assembly Mass | 2.2 kg | ||
| Model | AI-LM-6000-XY | ||
| Stage | Monolithic XY Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 152.5 mm x 152.5 mm x 80 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1.2 m/s | ||
| Bot Axis Max Velocity [3] | 0.7 m/s | ||
| Top Axis Max Peak Acceleration [3] | 5.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 2.0 G | ||
| Max Payload Capability | 20 kg | ||
| Assembly Mass | 4.7 kg | ||
