| Model | AI-6D-250XY-92Z |
| Stage | Hybrid Hexapod (6 DOF) |
| Travel - XY | 250mm (+/- 125mm) |
| Travel - Z | 92mm (+ 92mm/ - 0mm) |
| Travel - Pitch & Roll | +/- 20 deg |
| Travel - Yaw | 360 deg continuous |
| Dimensions (Length x Width x Height) | 435 mm x 435 mm x 707.5 mm |
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | |
| Linear Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution | ~0.02 arc-sec |
| Yaw Resolution | ~0.01 arc-sec |
| Max Linear Velocity [10] | 0.3 m/s |
| Max Angular Velocity (Pitch & Roll) [10] | 90 deg/s |
| Max Angular Velocity (Yaw) [10] | 180 deg/s |
| Assembly Mass | 130 kg |
| Max Payload [11] | 35 kg |
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