Hybrid Hexapod - Hybrid Hexapod (6 DOF)


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: Fit

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Good Fit

ALIO - Hybrid Hexapod Rotary under Tripod

Product Specifications

StageHybrid Hexapod  (6 DOF)
Travel - XY250mm (+/- 125mm)
Travel - Z92mm (+ 92mm/ - 0mm) 
Travel - Pitch & Roll  +/- 20 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)435 mm x 435 mm x 707.5 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications 
Linear ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution ~0.02 arc-sec
Yaw Resolution ~0.01 arc-sec
Max Linear Velocity [10]0.3 m/s
Max Angular Velocity (Pitch & Roll) [10]90 deg/s
Max Angular Velocity (Yaw) [10]180 deg/s
Assembly Mass130 kg
Max Payload [11]35 kg

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