Model | AI-BSD-2400-Z | ||
Stage | Vertical Z Stage | ||
Travel | 24 mm (+/- 12 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 100 mm x 188 mm | ||
Motor | Frameless Torque Motor, Precision Ball Screw | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Brake | Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake |
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Counterbalance | Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability |
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Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
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Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.8 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 125 nm | +/- 100 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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Straightness | +/- 2 µm | +/- 0.8 µm | +/- 0.4 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.1 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 20 kg | ||
Max Payload Capability (With Pneuboost) | 50 kg | ||
Assembly Mass | 6.6 kg |
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