Z-Lift & Vertical Stage - Vertical Z Stage


Scanning / Smooth Continuous Movement: N/A

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Fit

Throughput: Fit

ALIO - Z-Lift Stages - High Force Frameless Torque Motor with Precision Ball Screw with crossed roller bearings

Product Specifications

StageVertical Z Stage
Travel32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)175 mm x 100 mm x 202 mm
MotorFrameless Torque Motor, Precision Ball Screw
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
BrakeStandard: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: No Brake
CounterbalanceStandard: None Needed
Optional: Pneumatic Counterbalance to Increase Payload Capability
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 125 nm+/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 15 arc-sec
Yaw +/- 15 arc-sec
Roll +/- 15 arc-sec
Max Velocity [3]0.1 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Max Payload Capability (With Pneuboost)50 kg
Assembly Mass6.9 kg

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