Linear Motion System - Monolithic XY Stage with Open Center

AI-CM-15000-150-XY

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Best Fit

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - CM XY Open Center XY

Product Specifications

ModelAI-CM-15000-150-XY
StageMonolithic XY Stage with
Open Center
Travel150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)282.5 mm x 282.5 mm x 52 mm
Aperture /
Thru
150 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 5.0 µm +/- 2.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality+/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
0.9 m/s
Bot Axis Max
Velocity [3]
0.5 m/s
Top Axis Max
Peak Acceleration [3]
1.2 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
12 kg
Assembly Mass7.4 kg

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