Linear Motion System - Monolithic XY Stage with Open Center
Scanning / Smooth Continuous Movement: Best Fit
Step and Settle: Best Fit
No Movement on Power Loss: N/A
Aperture / Open Center: Best Fit
Precision: Best Fit
Throughput: Good Fit
| Model | AI-CM-20000-200-XY | ||
| Stage | Monolithic XY Stage with Open Center |
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| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 332.5 mm x 332.5 mm x 65 mm | ||
| Aperture / Thru | 200 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
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| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Bidirectional Linear Repeatability | +/- 50 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 4.0 µm | +/- 1.2 µm | +/- 0.7 µm |
| Flatness [2] | +/- 4.0 µm | +/- 3.0 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 15.0 arc-sec | ||
| Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
| Top Axis Max Velocity [3] | 1 m/s | ||
| Bot Axis Max Velocity [3] | 0.6 m/s | ||
| Top Axis Max Peak Acceleration [3] | 1.0 G | ||
| Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
| Max Payload Capability | 15 kg | ||
| Assembly Mass | 11.4 kg | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
