Linear Motion System - Monolithic XY Stage

AI-CM-20000-XY

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - CM XY integrated XY

Product Specifications

ModelAI-CM-20000-XY
StageMonolithic XY Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
275 mm x 275 mm x 60 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30
ResolutionStandard:
~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4.0 µm +/- 1.0 µm +/- 0.4 µm
Flatness [2] +/- 4.0 µm +/- 3.0 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1 m/s
Bot Axis Max
Velocity [3]
0.6
Top Axis Max
Peak Acceleration [3]
1.0 G
Bot Axis Max
Peak Acceleration [3]
0.4 G
Max Payload
Capability
15 kg
Assembly Mass12 kg

Contact ALIO.

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