Hybrid Hexapod - Hybrid Hexapod (6 DOF)


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: Fit

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Good Fit

ALIO - Mini Hybrid Hexapod

Product Specifications

StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)296 mm x 244 mm x 215.2 mm
DrivesXY: Direct Drive (Ironless Core Linear Motor)
Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidirectional RepeatabilityXY +/- 100 nm +/- 70 nm
Z +/- 100 nm +/- 70 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Pitch And Roll
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll~0.04 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc/sec5 arc/sec1 arc/sec
XZ & YZ250 arc/sec200 arc/sec50 arc/sec
Max Linear Velocity [3]XY150 mm/s
Z15 mm/s
Max Linear Acceleration [3]XY0.3 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll30 deg/s
Yaw3000 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>7200 deg/s²
Max Payload5 kg
Assembly Mass8.9 kg

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