Hybrid Hexapod - Hybrid Hexapod (6 DOF)


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Best Fit

ALIO - Hybrid Hexapod

Product Specifications

StageHybrid Hexapod (6 DOF)
Travel - XY100 mm (+/- 50 mm)
Travel - Z12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll  +/- 10 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)262.5 mm x 246 mm x 250.8 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidirectional RepeatabilityXY +/- 80 nm +/- 50 nm
Z +/- 80 nm +/- 50 nm
Pitch And Roll +/- 0.6 arc-sec +/- 0.4 arc-sec
Yaw +/- 0.6 arc-sec +/- 0.4 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Pitch And Roll
Minimum Incremental Step SizeXY  < 20  nm
Z < 20  nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout15 µm12 µm10 µm
Radial Runout15 µm12 µm10 µm
Wobble25 arc-sec20 arc-sec15 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll~0.02 arc-sec
Yaw0.04 arc-sec
OrthogonalityXY20 arc-sec5 arc-sec1 arc-sec
XZ & YZ250 arc-sec200 arc-sec50 arc-sec
Max Linear Velocity [3]0.5 m/s
Max Linear Acceleration [3]0.5 G
Max Angular Velocity [3]Pitch And Roll180 deg/s
Roll180 deg/s
Max Angular Acceleration [3]Pitch And Roll>1800 deg/s²
Yaw>3600 deg/s²
Max Payload2.5 kg
Assembly Mass20 kg

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