Hybrid Hexapod - Hybrid Hexapod (6 DOF)
Scanning / Smooth Continuous Movement: Best Fit
Step and Settle: Best Fit
No Movement on Power Loss: N/A
Aperture / Open Center: Good Fit
Precision: Best Fit
Throughput: Best Fit
| Model | AI-HH-100XY-6Z-56R-CM | |||
| Stage | Hybrid Hexapod (6 DOF) | |||
| Travel - XY | 100 mm (+/- 50 mm) | |||
| Travel - Z | 6 mm (+ 6 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 3 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 200 mm x 184 mm x 200.5 mm | |||
| Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
| Bearings | Crossed Roller Bearings | |||
| Counterbalance | Pneumatic Cylinder | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidirectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
| Z | +/- 80 nm | +/- 50 nm | ||
| Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
| Radial Runout | 15 µm | 12 µm | 10 µm | |
| Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Z | ||||
| Pitch And Roll | ~0.03 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | 0.05 m/s | |||
| Max Linear Acceleration [3] | 0.1 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
| Roll | 180 deg/s | |||
| Max Angular Acceleration [3] | Pitch And Roll | >1800 deg/s² | ||
| Yaw | >3600 deg/s² | |||
| Max Payload | 2 kg | |||
| Assembly Mass | 10 kg | |||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
