Hybrid Hexapod - Hybrid Hexapod
Scanning / Smooth Continuous Movement: Best Fit
Step and Settle: Best Fit
No Movement on Power Loss: N/A
Aperture / Open Center: Good Fit
Precision: Best Fit
Throughput: Best Fit
| Model | AI-HH-200XY-60Z-154RA | |||
| Stage | Hybrid Hexapod | |||
| Travel - XY | 200 mm (+/- 100 mm) | |||
| Travel - Z | 60 mm (+ 60 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 14 deg | |||
| Travel - Yaw | 360 deg continous | |||
| Dimensions (Length x Width x Height) | 443.2 mm x 410.1 mm x 378 mm | |||
| Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
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| Brake | Pneumatic Release, Spring Lock | |||
| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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| Bearings | Crossed Roller Bearings | |||
| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
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| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
| Z | +/- 100 nm | +/- 70 nm | ||
| Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
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| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | |||
| Yaw Runout | Axial Runout | 10 nm | 7 nm | 4 nm |
| Radial Runout | 10 nm | 7 nm | 4 nm | |
| Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
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| Z | ||||
| Pitch And Roll | ~0.02 arc-sec | |||
| Yaw | ~0.01 arc-sec | |||
| Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
| Max Linear Velocity [3] | XY | 500 mm/s | ||
| Z | 30 mm/s | |||
| Max Linear Acceleration [3] | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 60 deg/s | ||
| Yaw | 1800 deg/s | |||
| Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
| Yaw | >3600 deg/s² | |||
| Max Payload | 20 kg | |||
| Assembly Mass | 57 kg | |||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
