Model | AI-HH-30D-200XY-62Z-80R-CM | |||
Stage | Hybrid Hexapod (Angulares® ) | |||
Travel - XY | 200 mm (+/- 100 mm) | |||
Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 30 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 510 mm x 336.5 mm x 293.2 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
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Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidirectional Repeatability | XY | +/- 30 nm | ||
Z | +/- 200 nm | |||
Pitch And Roll | +/- 1 arc-sec | |||
Yaw | +/- 0.5 arc-sec | |||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
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Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
Radial Runout | 12 µm | 10 µm | 5 µm | |
Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
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Z | ||||
Pitch And Roll | ~0.15 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Max Linear Velocity [3] | XY | 50 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.1 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
Roll | >3000 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >2000 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 14 kg |
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