Hybrid Hexapod - Hybrid Hexapod (Angulares®)


Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Good Fit

Throughput: Good Fit

ALIO - Hybrid Hexapod Angulares

Product Specifications

StageHybrid Hexapod (Angulares® )
Travel - XY200 mm (+/- 100 mm)
Travel - Z62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continuous
Dimensions (Length x Width x Height)510 mm x 336.5 mm x 293.2 mm
DrivesXY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor)
Yaw: Torque Motor
FeedbackLinear Axes: Non-Contact Optical Linear Encoder
Rotary Axis: Non-Contact Optical Rotary Encoder
BearingsCrossed Roller Bearings
Rotary BrakeStandard: No Brake
Optional: Pneumatic Release, Spring Engage Brake (B)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6 
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Bidirectional RepeatabilityXY +/- 30 nm
Z +/- 200 nm
Pitch And Roll +/- 1 arc-sec
Yaw +/- 0.5 arc-sec
BacklashXY0 nm / arc-sec
(no backlash on any axis)
Pitch And Roll
Minimum Incremental Step SizeXY  < 20 nm
Z  < 20 nm
Pitch And Roll  < 0.1 arc-sec
Yaw  < 0.1 arc-sec
Yaw RunoutAxial Runout12 µm10 µm5 µm
Radial Runout12 µm10 µm5 µm
Wobble20 arc-sec15 arc-sec10 arc-sec
ResolutionXYStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll~0.15 arc-sec
Yaw0.04 arc-sec
Max Linear Velocity [3]XY50  mm/s
Z15  mm/s
Max Linear Acceleration [3]XY0.1 G
Z0.3 G
Max Angular Velocity [3]Pitch And Roll20 deg/s
Roll>3000 deg/s
Max Angular Acceleration [3]Pitch And Roll>1000 deg/s²
Yaw>2000 deg/s²
Max Payload5 kg
Assembly Mass14 kg

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