Hybrid Hexapod - Hybrid Hexapod (Angulares®)

AI-HH-30D-200XY-62Z-80R-LM

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Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Good Fit

Throughput: Good Fit

Product Specifications

Model		AI-HH-30D-200XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		571 mm x 401 mm x 322.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidirectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		30 kg