Hybrid Hexapod - Hybrid Hexapod (Angulares®)
Scanning / Smooth Continuous Movement: Good Fit
Step and Settle: Good Fit
No Movement on Power Loss: N/A
Aperture / Open Center: Good Fit
Precision: Good Fit
Throughput: Good Fit
| Model | AI-HH-30D-60XY-62Z-80R-BSD | |||
| Stage | Hybrid Hexapod (Angulares® ) | |||
| Travel - XY | 60 mm (+/- 30 mm) | |||
| Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
| Travel - Pitch & Roll | +/- 30 deg | |||
| Travel - Yaw | 360 deg continuous | |||
| Dimensions (Length x Width x Height) | 199 mm x 208 mm x 285.2 mm | |||
| Drives | XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
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| Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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| Bearings | Crossed Roller Bearings | |||
| Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
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| Cables | High Flex, 10M Cycle, 3m Length | |||
| Structure | Anodized Aluminum 6061-T6 | |||
| Environment | Ambient | |||
| Operating Temperature | 0°C to 50°C | |||
| Humidity | 10% to 80% Non-Condensing | |||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |
| Bidirectional Repeatability | XY | +/- 100 nm | ||
| Z | +/- 200 nm | |||
| Pitch And Roll | +/- 1 arc-sec | |||
| Yaw | +/- 0.5 arc-sec | |||
| Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
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| Z | ||||
| Pitch And Roll | ||||
| Yaw | ||||
| Minimum Incremental Step Size | XY | < 20 nm | ||
| Z | < 20 nm | |||
| Pitch And Roll | < 0.1 arc-sec | |||
| Yaw | < 0.1 arc-sec | Pitch And Roll | ||
| Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
| Radial Runout | 12 µm | 10 µm | 5 µm | |
| Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
| Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
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| Z | ||||
| YawPitch And Roll | ~0.15 arc-sec | |||
| Yaw | 0.04 arc-sec | |||
| Max Linear Velocity [3] | XY | 50 mm/s | ||
| Z | 15 mm/s | |||
| Max Linear Acceleration [3] | XY | 0.1 G | ||
| Z | 0.3 G | |||
| Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
| Roll | >3000 deg/s | |||
| Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
| Yaw | >2000 deg/s² | |||
| Max Payload | 5-10 kg | |||
| Assembly Mass | ||||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
