| Model | AI-HH-ST14-200XY-60Z-104R |
| Travel - XY | 200 mm (+/- 100 mm) |
| Travel - Z | 60 mm (+ 60 mm /- 0 mm) |
| Travel - Pitch & Roll | +/- 30 deg |
| Travel - Yaw | 360 deg continous |
| Dimensions (Length x Width x Height) | 292 mm x 275 mm x 400 mm |
| Stage | Hybrid Hexapod |
| Drives | XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor |
| Feedback | Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications | (STD) |
| Linear Resolution with Encoder Option | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Pitch And Roll Resolution with Encoder Option | ~0.01 arc-sec |
| Yaw Resolution with Encoder Option | 0.02 arc-sec |
| Max Linear Velocity [2] | 20 mm/s |
| Max Angular Velocity (Pitch & Roll) [2] | 10 deg/s |
| Max Angular Velocity (Yaw) [2] | 540 deg/s |
| Max Payload [3] | 10 kg |
| Assembly Mass | 28 kg |
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