Model | AI-HH-ST14-200XY-60Z-104R |
Travel - XY | 200 mm (+/- 100 mm) |
Travel - Z | 60 mm (+ 60 mm /- 0 mm) |
Travel - Pitch & Roll | +/- 30 deg |
Travel - Yaw | 360 deg continous |
Dimensions (Length x Width x Height) | 292 mm x 275 mm x 400 mm |
Stage | Hybrid Hexapod |
Drives | XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor |
Feedback | Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder |
Bearings | Crossed Roller Bearings |
Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
Cables | High Flex, 10M Cycle, 3m Length |
Structure | Anodized Aluminum 6061-T6 |
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications | (STD) |
Linear Resolution with Encoder Option | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
Pitch And Roll Resolution with Encoder Option | ~0.01 arc-sec |
Yaw Resolution with Encoder Option | 0.02 arc-sec |
Max Linear Velocity [2] | 20 mm/s |
Max Angular Velocity (Pitch & Roll) [2] | 10 deg/s |
Max Angular Velocity (Yaw) [2] | 540 deg/s |
Max Payload [3] | 10 kg |
Assembly Mass | 28 kg |
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