Hybrid Hexapod - Hybrid Hexapod


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: Best Fit

Aperture / Open Center: Good Fit

Precision: Good Fit

Throughput: Fit

ALIO - Hybrid Hexapod Stepper

Product Specifications

Travel - XY200 mm (+/- 100 mm)
Travel - Z60 mm (+ 60 mm /- 0 mm)
Travel - Pitch & Roll  +/- 30 deg
Travel - Yaw360 deg continous
Dimensions (Length x Width x Height)292 mm x 275 mm x 400 mm
StageHybrid Hexapod 
DrivesXY, Pitch & Yaw: Stepper Motor
Yaw: Torque Motor
FeedbackStandard: No Encoder
Optional: Non-Contact Optical Linear Encoder, Rotary Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
Optional: Magnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications(STD)
Linear Resolution with Encoder OptionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution with Encoder Option ~0.01 arc-sec
Yaw Resolution with Encoder Option0.02 arc-sec
Max Linear Velocity [2]20 mm/s
Max Angular Velocity (Pitch & Roll) [2]10 deg/s
Max Angular Velocity (Yaw) [2]540 deg/s
Max Payload [3]10 kg
Assembly Mass28 kg

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