Micron 2 (µII) Stage - Linear Stage

AI-LM-10000-UII-S

Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Fit

Throughput: Good Fit

ALIO - Micron 2 Stages - micron II Linear Motion Single Rail X

Product Specifications

ModelAI-LM-10000-UII-S
StageLinear Stage
Travel100 mm (+/- 50 mm)
Dimensions
(Length x Width x Height)
320 mm x 208 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10^-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 5 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max (Vertical)
Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass8 kg

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