Z-Lift & Vertical Stage - Vertical Z Stage

AI-LM-10000-Z-ABCB

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Z-Lift Stages - Air Bearing Pneumatic Cylinder Counterbalance_Direct Drive Ironless Core Linear

Product Specifications

ModelAI-LM-10000-Z-ABCB
StageVertical Z Stage
Travel100mm (+/- 50mm)
Dimensions (Length x Width x Height)183.5mm x 50mm x 323mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceAir Bearing Pneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 3.0 µm +/- 0.7 µm +/- 0.3 µm
Bidirectional Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 2.5 µm +/- 1.5 µm +/- 1.0 µm
Flatness [2] +/- 2.0 µm +/- 1.0 µm
Pitch [2] +/- 10.0 arc-sec
Yaw +/- 10.0 arc-sec
Roll +/- 6.0 arc-sec
Max Velocity [3]0.25 m/s
Max Peak Acceleration [3]3.5 G
Max Payload Capability12 kg
Assembly Mass4.7 kg

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