Air Bearing System - Air Bearing Linear Stage

AI-LM-100000-AB8

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Good Fit

Product Specifications

ModelAI-LM-100000-AB8
StageAir Bearing Linear Stage
Travel1000 mm (+/- 500 mm)
Dimensions
(Length x Width x Height)
1387.6 mm x 196.85 mm x
75.90 mm
Dimensions
Moving Plate (Length x Width)
305 mm x 196.85 mm
DriveDirect Drive (Ironless Core
Linear Motor)
FeedbackNon-Contact Optical Linear
Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle, 3m
Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Base StructureGranite, Aluminum, or
Steel

Designed per System Requirements
EnvironmentAmbient
Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm per 100mm Travel  +/- 1 µm  +/- 0.5 µm
Bidirectional
Repeatability
 +/- 30 µm +/- 30 µm +/- 10 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1 µm per 100mm Travel 
Flatness [2] +/- 1 µm per 100mm Travel 
Pitch +/- 5 arc-sec
Yaw +/- 5 arc-sec
Roll +/- 5 arc-sec
Max Velocity
[3]
2.0 m/s
Max
Acceleration [3]
2.0 G
Max Pitch
Moment
79 nm
Max Roll
Moment
75 nm
Max Yaw Moment37 nm
Vertical Z
Stiffness
480 N/µm
Horizontal Y
Stiffness
140 N/µm
Max Payload
Capacity
60 kg
Assembly Mass26 kg

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