Micron 2 (µII) Stage - Linear Stage
Scanning / Smooth Continuous Movement: N/A
Step and Settle: Fit
No Movement on Power Loss: Best Fit
Aperture / Open Center: N/A
Precision: Fit
Throughput: Best Fit
| Model | AI-LM-100000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 1000 mm (+/- 500 mm) | ||
| Dimensions (Length x Width x Height) | 1366 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 40 µm | +/-10 µm | +/- 5 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
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| Straightness | +/- 30 µm | +/- 20 µm | +/- 10 µm |
| Flatness [2] | +/- 150 µm | +/- 20 µm | +/- 15 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
