Linear Motion System - Monolithic XY Stage with Open Center

AI-LM-15000-150-XY

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Best Fit

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - open Center XY

Product Specifications

ModelAI-LM-15000-150-XY
StageMonolithic XY Stage with Open Center
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
326.5 mm x 326.5 mm x 68 mm
Aperture /
Thru
150 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length

Optional: Cable Management Brackets ("-CAB")
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 4.0 µm +/- 1.2 µm +/- 0.6 µm
Bidirectional
Linear Repeatability
 +/- 50 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.0 µm +/- 1.2 µm +/- 0.6 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 15.0 arc-sec
Orthogonality +/- 20.0 arc-sec +/- 5.0 arc-sec +/- 1.0 arc-sec
Top Axis Max
Velocity [3]
1.7 m/s
Bot Axis Max
Velocity [3]
1.0  m/s
Top Axis Max
Peak Acceleration [3]
4.0 G
Top Axis Max
Peak Acceleration [3]
1.4 G
Max Payload
Capability
25 kg
Assembly Mass14 kg

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