| Model | AI-LM-15000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 524 mm x 196.85 mm x 75.90 mm |
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| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
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| Feedback | Non-Contact Optical Linear Encoder |
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| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
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| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
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| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 13 kg | ||
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