Micron 2 (µII) Stage - Linear Stage

AI-LM-15000-UII-SN

Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Fit

Throughput: Good Fit

micron II Linear Motion -S_Single Rail Naked X

Product Specifications

ModelAI-LM-15000-UII-SN
StageLinear Stage
Travel150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
330 mm x 72 mm x 57 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsRecirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 6 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch10 arc-sec
Yaw10 arc-sec
Roll6 arc-sec
Max Velocity
[3]
2 m/s
Max
Acceleration [3]
4.0 G
Max
(Vertical) Payload Capability 
40 kg
Max
(Horizontal) Payload Capability 
32 kg
Assembly Mass2.5 kg

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