Linear Motion System - Linear Stage

AI-LM-15000

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - X Enclosed Stage

Product Specifications

ModelAI-LM-15000
StageLinear Stage
Travel 150 mm (+/- 75 mm)
Dimensions
(Length x Width x Height)
275 mm x 120 mm x 45 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3.0 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 2.5 µm +/- 1.5 µm +/- 1.2 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch Y [2] +/- 15.0 arc-sec
Yaw +/- 15.0 arc-sec
Roll +/- 8.0 arc-sec
Max Velocity
[3]
2.1 m/s
Max
Acceleration [3]
6.0 G
Max Payload
Capability
25 kg
Assembly Mass4.4 kg

Contact ALIO.

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