Linear Motion System - Monolithic XY Stage (Asymmetrical)

AI-LM-160×100-XY

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - XY Integrated XY Asymmetric Small

Product Specifications

ModelAI-LM-160x100-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X160 mm (+/- 80 mm)
Travel - Y100 mm (+/- 50 mm)
Dimensions
(Length X Width X Height)
275 mm x 175 mm x 80 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 3 µm +/- 0.7 µm +/- 0.4 µm
Bidirectional
Linear Repeatability
 +/- 30 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 1.0 µm +/- 0.7 µm +/- 0.4 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4.0 arc-sec
Orthogonality +/- 10.0 arc-sec +/- 2.5 arc-sec +/- 0.5 arc-sec
Max Velocity
[3]
1 m/s
Max Peak
Acceleration [3]
1.5 G
Max Payload
Capability
25 kg
Assembly Mass11.4 kg

Contact ALIO.

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