Z-Lift & Vertical Stage - Vertical Z Stage

AI-LM-17000-(“PAYLOAD”)-Z-MCB-BASE

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Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Good Fit

Throughput: Fit

Product Specifications

Model	AI-LM-17000-("PAYLOAD")-Z-MCB-BASE
Stage	Vertical Z Stage
Travel	170 mm (+/- 85 mm)
Payload Options	20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)	262 mm x 50 mm x 340 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 2.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	18 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Payload (Nominal)	20 N	30 N	40 N	50 N	60 N
Minimum To Maximum Payload Range	15-25 N	25-35 N	35-45 N	45-55 N	55-65 N
Assembly Mass	13.8 kg