| Model | AI-LM-20000-AB | 
| Stage | Air Bearing Linear Stage | 
| Travel | 200 mm (+/- 100 mm) | 
| Dimensions (Length x Width x Height) | 422.4 mm x 150 mm x 63.8 mm | 
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm | 
| Drive | Direct Drive (Ironless Core Linear Motor) | 
| Feedback | Non-Contact Optical Linear Encoder | 
| Bearings | Air Bearings | 
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System | 
| Structure | Anodized Aluminum 6061-T6 | 
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements | 
| Environment | Ambient | 
| Operating Temperature | 0°C to 50°C | 
| Humidity | 10% to 80% Non-Condensing | 
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) | 
| Max Pitch Moment [2] | 20 Nm | 
| Max Roll Moment [2] | 24 Nm | 
| Max Yaw Moment [2] | 10 Nm | 
| Vertical Z Stiffness | 250 N/µm | 
| Horizontal Y Stiffness | 105 N/µm | 
| Max Velocity [3] | 2.0 m/s | 
| Max Acceleration [3] | 2.0 G | 
| Max Load Capacity | 30 kg | 
| Assembly Mass | 6.5 kg | 
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