Micron 2 (µII) Stage - Linear Stage
Scanning / Smooth Continuous Movement: Good Fit
Step and Settle: Good Fit
No Movement on Power Loss: N/A
Aperture / Open Center: N/A
Precision: Fit
Throughput: Good Fit
| Model | AI-LM-20000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 380 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 8 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
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| Straightness | +/- 4 µm | +/- 3 µm | |
| Flatness [2] | +/- 4 µm | +/- 3 µm | |
| Pitch | 15 arc-sec | ||
| Yaw | 15 arc-sec | ||
| Roll | 8 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 2.9 kg | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs
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