Micron 2 (µII) Stage - Linear Stage


Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Good Fit

Throughput: Good Fit

micron II Linear Motion - Wide Large carrier Dual Rail X

Product Specifications

StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions (Length x Width x Height)520 mm x 388 mm x 88 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional Linear Repeatability +/- 0.5 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll8 arc-sec
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max (Vertical) Payload Capability 100 kg
Max (Horizontal) Payload Capability 70 kg
Assembly Mass23 kg

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