Micron 2 (µII) Stage - Linear Stage

AI-LM-20000-UII

Scanning / Smooth Continuous Movement: Good Fit

Step and Settle: Good Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Good Fit

Throughput: Good Fit

ALIO - Micron 2 Stages - micron II Linear Motion Dual Rail X

Product Specifications

ModelAI-LM-20000-UII
StageLinear Stage
Travel200 mm (+/- 100 mm)
Dimensions
(Length x Width x Height)
420 mm x 258 mm x 82.5 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball
Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
(STD)ULTRANANO
Linear
Displacement Accuracy
 +/- 8 µm +/- 2 µm +/- 1 µm
Bidirectional
Linear Repeatability
 +/- 0.5 µm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness
In Y
 +/- 4 µm +/- 3 µm
Flatness [2] +/- 4 µm +/- 3 µm
Pitch [2] +/- 7.5 arc-sec
Yaw +/- 7.5 arc-sec
Roll +/- 4 arc-sec
Max Velocity
[3]
3 m/s
Max Peak
Acceleration [3]
10.0 G
Max Payload
Capability 
70 kg
Assembly Mass13 kg

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