Z-Lift & Vertical Stage - Vertical Z Stage
Scanning / Smooth Continuous Movement: Best Fit
Step and Settle: Best Fit
No Movement on Power Loss: N/A
Aperture / Open Center: N/A
Precision: Best Fit
Throughput: Good Fit
| Model | AI-LM-20000-Z-ABCB | ||
| Stage | Vertical Z Stage | ||
| Travel | 200mm (+/- 100mm) | ||
| Dimensions (Length x Width x Height) | 230mm x 50mm x 484mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Counterbalance | Air Bearing Pneumatic Cylinder | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
| Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness In Y | +/- 3.0 µm | +/- 2.0 µm | +/- 1.5 µm |
| Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
| Pitch [2] | +/- 15.0 arc-sec | ||
| Yaw | +/- 15.0 arc-sec | ||
| Roll | +/- 8.0 arc-sec | ||
| Max Velocity [3] | 0.25 m/s | ||
| Max Peak Acceleration [3] | 2.5 G | ||
| Max Payload Capability | 25 kg | ||
| Assembly Mass | 9.3 kg | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
