| Model | AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION") | |||||
| Stage | Vertical Z Stage | |||||
| Travel | 24 mm (+/-12 mm) | |||||
| Payload Options | 2 N, 8 N, 14 N, 19 N, or 24 N | |||||
| Dimensions (Length x Width x Height) | 165 mm x 96 mm x 130 mm | |||||
| Drive | Direct Drive (Ironless Core Linear Motor) | |||||
| Feedback | Non-Contact Optical Linear Encoder | |||||
| Bearings | Crossed Roller Bearings | |||||
| Counterbalance | Magnetic Spring (Constant Force) | |||||
| Cables | High Flex, 10M Cycle, 3m Length | |||||
| Structure | Anodized Aluminum 6061-T6 Optional: Stainless Steel |
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| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | |||||
| Humidity | 10% to 80% Non-Condensing | |||||
| Performance Specifications [1] | (STD) | ULTRA | NANO | |||
| Linear Displacement Accuracy | +/- 5 µm | +/- 0.7 µm | +/- 0.3 µm | |||
| Bidirectional Linear Repeatability | +/- 75 nm | +/- 45 nm | ||||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 3.0 µm | +/- 2.0 µm | ||||
| Flatness [2] | +/- 3.0 µm | +/- 2.0 µm | ||||
| Pitch | 10 arc-sec | |||||
| Yaw | 10 arc-sec | |||||
| Roll | 10 arc-sec | |||||
| Max Velocity [3] | 0.1 m/s | |||||
| Payload (Nominal) | -- | 2 N | 8 N | 14 N | 19 N | 24 N |
| Minimum To Maximum Payload Range | -- | 0-6 N | 4-12 N | 10-18 N | 15-23 N | 18-30 N |
| Assembly Mass | 4.6 kg | |||||
| Moving Mass | 2 kg | |||||
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