Model | AI-LM-30000 | ||
Stage | Linear Stage | ||
Travel | 300 mm (+/- 150 mm) | ||
Dimensions (Length x Width x Height) | 506 mm x 178 mm x 55 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5.0 µm | +/- 1.0 µm | +/- 0.6 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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Straightness | +/- 6.0 µm | +/- 4.5 µm | +/- 3.0 µm |
Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
Pitch Y [2] | +/- 18.0 arc-sec | ||
Yaw | +/- 18.0 arc-sec | ||
Roll | +/- 10.0 arc-sec | ||
Max Velocity [3] | 2.4 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max Payload Capability | 50 kg | ||
Assembly Mass | 15.2 kg |
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