Linear Motion System - Monolithic XY Stage (Asymmetrical)
Scanning / Smooth Continuous Movement: Best Fit
Step and Settle: Best Fit
No Movement on Power Loss: N/A
Aperture / Open Center: N/A
Precision: Best Fit
Throughput: Good Fit
| Model | AI-LM-300x200-XY | ||
| Stage | Monolithic XY Stage (Asymmetrical) |
||
| Travel - X | 300 mm (+/- 150 mm) | ||
| Travel - Y | 200 mm (+/- 100 mm) | ||
| Dimensions (Length x Width x Height) | 500 mm x 336 mm x 100mm | ||
| Drives | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2 µm | +/- 1.0 µm | +/- 0.5 µm |
| Flatness [2] | +/- 5 µm | +/- 2 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Orthogonality | 20 arc-sec | 5 arc-sec | 1 arc-sec |
| Max Velocity [3] | 1 m/s | ||
| Max Acceleration [3] | 0.7 G | ||
| Max Payload Capability | 30 kg | ||
| Assembly Mass | 28 kg | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
