Model | AI-LM-420RA | ||
Stage | Rotary Stage | ||
Travel | +/- 5 deg | ||
Diameter | 420 mm | ||
Dimensions (Length x Width x Height) | 490 mm x 420 mm x 40 mm | ||
Thru | 330 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Rotary Encoder | ||
Bearings | Angular Contact (Duplex Pair) | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Angular Accuracy | N/A | +/- 1.0 arc-sec | |
Bidirectional Angular Repeatability | +/- 0.4 arc-sec | +/- 0.3 arc-sec | +/- 0.2 arc-sec |
Resolution [2] | Standard: 0.005 arc-sec (Analog) Optional: 0.002 - 5.0 arc-sec (Digital) |
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Axial Runout | +/- 1.5 µm | N/A | |
Radial Runout | +/- 1.5 µm | N/A | |
Wobble | +/- 2.5 arc-sec | N/A | |
Max Velocity [3] | 900 deg/s | ||
Max Acceleration [3] | 800000 deg/s² | ||
Max Load (Axial) | 40 kg | ||
Max Load (Radial) | 20 kg | ||
Assembly Mass | 8.7 kg |
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