Z-Lift & Vertical Stage - Vertical Z Stage

AI-LM-5000-15N-Z-CB

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Best Fit

ALIO - Z-Lift Stages - Standard-Z-Voice-Coil-or-Linear-Motor-with-crossed-roller-bearings

Product Specifications

ModelAI-LM-5000-15N-Z-CB
StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)165 mm x 96 mm x 136 mm
DriveDirect Drive Ironless Core Linear Motor
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 8.0 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm +/- 45 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X +/- 5.0 µm +/- 2.5 µm
Flatness [2] +/- 5.0 µm +/- 2.5 µm
Pitch [2] +/- 12.0 arc-sec
Yaw +/- 12.0 arc-sec
Roll +/- 12.0 arc-sec
Max Velocity [3]0.2 m/s
Max Peak Acceleration [3]1.5 G
Max Payload Capability10 kg
Force15 N
Assembly Mass4.4 kg

Contact ALIO.

Want to learn more about the services we offer?