Z-Lift & Vertical Stage - Vertical Z Stage

AI-LM-5000-(“PAYLOAD”)-Z-MCB-(“ORIENTATION”)

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Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

Product Specifications

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 156 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.5 µm
Pitch	14 arc-sec
Yaw	14 arc-sec
Roll	14 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	5.2 kg
Moving Mass	2.1 kg