Z-Lift & Vertical Stage - Vertical Z Stage


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Z-Lift Stages - Z Stage Voice Coil or Direct Drive Crossed Roller Bearings Non-contact Magnetic Spring

Product Specifications

StageVertical Z Stage
Travel50 mm (+/- 25 mm)
Payload Options30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)182 mm x 106 mm x 176 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalanceMagnetic Spring (Constant Force)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Stainless Steel
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 7 µm +/- 1.0 µm +/- 0.4 µm
Bidirectional Linear Repeatability +/- 100 nm +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 6.0 µm +/- 3.0 µm
Flatness [2] +/- 6.0 µm +/- 3.0 µm
Pitch15 arc-sec
Yaw15 arc-sec
Roll15 arc-sec
Max Velocity [3]0.05 m/s
Payload (Nominal)30 N, 50 N, 60 N, 70 N, 80 N, or 90 N50 N60 N70 N80 N90 N
Minimum To Maximum Payload Range24-36 N44-56 N54-66 N64-76 N74-86 N84-96 N
Assembly Mass7.1 kg
Moving Mass3.3 kg

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