| Model | AI-LM-6000 | ||
| Stage | Linear Stage | ||
| Travel | 60 mm (+/- 30 mm) | ||
| Dimensions (Length x Width x Height) | 168 mm x 120 mm x 40 mm | ||
| Motor | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
| Bidirectional Linear Repeatability | +/- 30 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
| Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
| Pitch Y [2] | +/- 10.0 arc-sec | ||
| Yaw | +/- 10.0 arc-sec | ||
| Roll | +/- 6.0 arc-sec | ||
| Max Velocity [3] | 1.2 m/s | ||
| Max Acceleration [3] | 5.0 G | ||
| Max Payload Capability | 20 kg | ||
| Assembly Mass | 2.2 kg | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs