Z-Lift & Vertical Stage - Vertical Z Stage

AI-LM-6000-50N-Z-CB

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Best Fit

ALIO - Z-Lift Stages - Stage Pneumatic Cylinder Counter Balance Voice Coil or Direct Drive crossed roller bearings

Product Specifications

ModelAI-LM-6000-50N-Z-CB
StageVertical Z Stage
Travel60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)175 mm x 125 mm x 235 mm
MotorDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Linear Displacement Accuracy +/- 5 µm +/- 1.0 µm +/- 0.5 µm
Bidirectional Linear Repeatability +/- 75 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 4 µm +/- 1.0 µm +/- 0.5 µm
Flatness [2] +/- 3.0 µm +/- 1.5 µm
Pitch +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.25 m/s
Max Acceleration [3]1.0 G
Max Payload Capability20 kg
Force50 N
Assembly Mass12.3 kg

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