Air Bearing System - Air Bearing Linear Stage


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Good Fit

Product Specifications

StageAir Bearing Linear Stage
Travel600 mm (+/- 300 mm)
Dimensions (Length x Width x Height)828.8 mm x 150 mm x
63.8 mm
Dimensions Moving Plate (Length x Width)150 mm x 150 mm
DriveDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsAir Bearings
CablesHigh Flex, 10M Cycle,
3m Length

Optional: Trackless Cable Management System
StructureAnodized Aluminum 6061-T6
Granite, Aluminum, or Steel

Designed per System Requirements
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]
ResolutionStandard: ~4.88 nm after 4096

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Pitch Moment [2]
20 Nm
Max Roll Moment [2]24 Nm
Max Yaw Moment [2]10 Nm
Vertical Z Stiffness250 N/µm
Horizontal Y Stiffness105 N/µm
Max Velocity [3]2.0 m/s
Max Acceleration [3]2.0 G
Max Load Capacity30 kg
Assembly Mass11.7 kg

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