Micron 2 (µII) Stage - Linear Stage
Scanning / Smooth Continuous Movement: Good Fit
Step and Settle: Good Fit
No Movement on Power Loss: N/A
Aperture / Open Center: N/A
Precision: Good Fit
Throughput: Good Fit
| Model | AI-LM-60000-UII | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness In Y | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 21 kg | ||
Get in touch with ALIO: Expert solutions for your precision motion control needs
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
