Micron 2 (µII) Stage - Linear Stage
Scanning / Smooth Continuous Movement: N/A
Step and Settle: Fit
No Movement on Power Loss: Best Fit
Aperture / Open Center: N/A
Precision: Fit
Throughput: Best Fit
| Model | AI-SBS-30000-UII | |
| Stage | Linear Stage | |
| Travel | 300 mm (+/- 150 mm) | |
| Dimensions (Length x Width x Height) | 593 mm x 258 mm x 69 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 615 mm x 258 mm x 69 mm | |
| (-Ebrk) Dimensions (Length x Width x Height) | 665 mm x 258 mm x 69 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m Length | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 12 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
| Straightness In Y | +/- 5 µm | +/- 3 µm |
| Flatness [2] | +/- 5 µm | +/- 3 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
| Max Payload Capability With Axis Oriented Vertically | 40 kg | |
| Assembly Mass | 13 kg | |
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