Micron 2 (µII) Stage - Linear Stage


Scanning / Smooth Continuous Movement: N/A

Step and Settle: Fit

No Movement on Power Loss: Best Fit

Aperture / Open Center: N/A

Precision: Fit

Throughput: Best Fit

micron II Linear Motion - Ball Screw_Direct Drive Frameless Torque Motor_Dual Rail X

Product Specifications

StageLinear Stage
Travel50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)343 mm x 258 mm x 69 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)365 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)415 mm x 258 mm x 69 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 5 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y +/- 3 µm +/- 2 µm
Flatness [2] +/- 3 µm +/- 2 µm
Pitch [2] +/- 12 arc-sec
Yaw +/- 12 arc-sec
Roll +/- 12 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally70 kg
Max Payload Capability With Axis Oriented Vertically40 kg
Assembly Mass11 kg

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