Linear Motion System - Monolithic XY Stage (Asymmetrical)

AI-SLM-395×320-XY

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

ALIO - Linear Motion Stages - SLM XY Integrated XY

Product Specifications

ModelAI-SLM-395x320-XY
StageMonolithic XY Stage
(Asymmetrical)
Travel - X395 mm
Travel - Y320 mm
Dimensions
(Length X Width X Height)
672 mm x 525 mm x 145 mm
DrivesDirect Drive (Ironless Core Linear Motor)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance
Specifications [1]
STDULTRANANO
Linear
Displacement Accuracy
+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Bidirectional
Linear Repeatability
+/- 30 nm
ResolutionStandard: ~4.88 nm after
4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness+/- 5.0 µm+/- 2.0 µm+/- 1.0 µm
Flatness [2]+/- 10.0 µm+/- 5.0 µm+/- 2.0 µm
Pitch [2]+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Yaw+/- 18.0 arc-sec+/- 18.0 arc-sec+/- 10.0 arc-sec
Roll+/- 10.0 arc-sec+/- 10.0 arc-sec+/- 10.0 arc-sec
Orthogonality+/- 20.0 arc-sec+/- 5.0 arc-sec+/- 2.0 arc-sec
Max Velocity
[3]
1.5 m/s
Max Peak
Acceleration [3]
0.59 G
Max Payload
Capability
200 kg
Assembly Mass98 kg

Contact ALIO.

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