Rotary Motion System - Rotary Stage


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Good Fit

Precision: Best Fit

Throughput: Best Fit

ALIO - Rotary Motion Systems - Rotary TM with aperture 360 degrees

Product Specifications

StageRotary Stage
Travel360 deg continuous
Diameter154 mm
Dimensions (Length x Width x Height)173 mm x 154 mm x 84 mm
Aperture / Thru72 mm
DriveTorque Motor
FeedbackNon-Contact Optical Rotary Encoder
SensorsIntegrated Home
BearingsAngular Contact (Duplex Pair)
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRANANO
Angular AccuracyN/A +/- 3.0 arc-sec
Bidirectional Angular Repeatability +/- 0.5 arc-sec
Axial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Radial Runout +/- 5.0 µm +/- 3.5 µm +/- 2.0 µm
Wobble +/- 10.0 arc-sec +/- 5.0 arc-sec +/- 3.0 arc-sec
Resolution [2]Standard: 0.013 arc-sec (Analog)
Optional: 0.004 - 14.0 arc-sec (Digital)
Max Velocity [3]5500 deg/s
Max Acceleration [3]160000 deg/s²
Max Load (Axial)20 kg
Max Load (Radial)20 kg
Assembly Mass4.4 kg

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