Model | AI-TM-80R | ||
Stage | Rotary Stage | ||
Travel | 360 deg continuous | ||
Diameter | 80 mm | ||
Dimensions (Length x Width x Height) | 96mm x 80 mm x 60 mm | ||
Aperture / Thru | 6 mm | ||
Drive | Torque Motor | ||
Feedback | Non-Contact Optical Rotary Encoder | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Angular Accuracy | N/A | +/- 3.0 arc-sec | |
Bidirectional Angular Repeatability | +/- 0.7 arc-sec | +/- 0.6 arc-sec | +/- 0.4 arc-sec |
Resolution [2] | Standard: 0.027 arc-sec (Analog) Optional: 0.007 - 27.0 arc-sec (Digital) |
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Axial Runout | +/- 6.0 µm | +/- 5.0 µm | +/- 4.0 µm |
Radial Runout | +/- 6.0 µm | +/- 5.0 µm | +/- 4.0 µm |
Wobble | +/- 12.5 arc-sec | +/- 10.0 arc-sec | +/- 7.5 arc-sec |
Max Velocity [3] | >6000 deg/s | ||
Max Acceleration [3] | 200000 deg/s² | ||
Max Load (Axial) | 2.5 kg | ||
Max Load (Radial) | 2.5 kg | ||
Assembly Mass | 1.1 kg |
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