| Model | AI-VBS-15000 | ||
| Stage | Linear Stage | ||
| Travel | 150 mm (+/- 75 mm) | ||
| Dimensions (Length x Width x Height) | 370 mm x 120 mm x 50 mm | ||
| Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
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| (-Pbrk) Dimensions (Length x Width x Height) | 404 mm x 120 mm x 50 mm | ||
| (-Ebrk) Dimensions (Length x Width x Height) | 452 mm x 120 mm x 50 mm | ||
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Crossed Roller Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length |
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| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm | +/- 1.0 µm | +/- 0.4 µm |
| Backlash | 0 nm | ||
| Bidirectional Linear Repeatability | +/- 100 nm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness | +/- 3.5 µm | +/- 2.5 µm | +/- 1.5 µm |
| Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
| Pitch [2] | +/- 15 arc-sec | ||
| Yaw | +/- 15 arc-sec | ||
| Roll | +/- 15 arc-sec | ||
| Max Velocity [3] | 0.3 m/s | ||
| Max Peak Acceleration [3] | 1.0 G | ||
| Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
| Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
| Assembly Mass | 4.6 kg | ||
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